Matches in DBpedia 2015-10 for { <http://doi.org/10.1116/1.1376704> ?p ?o }
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- 1.1376704 author "M. Nakamura, K. Hino, T. Sasaki, Y. Shiokawa and T. Fujii".
- 1.1376704 doi "10.1116/1.1376704".
- 1.1376704 isCitedBy Ion-attachment_mass_spectrometry.
- 1.1376704 issue "4".
- 1.1376704 journal Journal_of_Vacuum_Science_and_Technology_A.
- 1.1376704 pages "1105".
- 1.1376704 title "In situ analysis of perfluoro compounds in semiconductor process exhaust: Use of Li+ ion-attachment mass spectrometry".
- 1.1376704 volume "19".
- 1.1376704 year "2001".