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- 22.989969 accessdate "2015-06-05".
- 22.989969 date "March 2002".
- 22.989969 doi "10.1109/22.989969".
- 22.989969 first1 "L.P.B.".
- 22.989969 first2 "J.F.".
- 22.989969 first3 "E.".
- 22.989969 isCitedBy Linda_P.B._Katehi.
- 22.989969 issue "3".
- 22.989969 journal "IEEE Transactions on Microwave Theory and Techniques".
- 22.989969 last1 "Katehi".
- 22.989969 last2 "Harvey".
- 22.989969 last3 "Brown".
- 22.989969 pages "858–866".
- 22.989969 title "MEMS and Si micromachined circuits for high-frequency applications".
- 22.989969 url "http://ieeexplore.ieee.org/xpl/login.jsp?tp=&arnumber=989969&url=http%3A%2F%2Fieeexplore.ieee.org%2Fxpls%2Fabs_all.jsp%3Farnumber%3D989969".
- 22.989969 volume "50".