Matches in DBpedia 2015-10 for { <http://doi.org/10.1088/0960-1317/17/2/026> ?p ?o }
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- 026 bibcode "2007JMiMi..17..384A".
- 026 doi "10.1088/0960-1317/17/2/026".
- 026 first1 "L. R.".
- 026 first2 "N.".
- 026 first3 "R.".
- 026 first4 "A. J.".
- 026 first5 "M. A.".
- 026 first6 "K. F.".
- 026 isCitedBy Fluorine.
- 026 issue "2".
- 026 journal "Journal of Micromechanics and Microengineering".
- 026 last1 "Arana".
- 026 last2 "Mas".
- 026 last3 "Schmidt".
- 026 last4 "Franz".
- 026 last5 "Schmidt".
- 026 last6 "Jensen".
- 026 page "384".
- 026 title "Isotropic Etching of Silicon in Fluorine Gas for MEMS Micromachining".
- 026 volume "17".
- 026 year "2007".