Matches in DBpedia 2015-10 for { <http://doi.org/10.1016/0167-9317(95)00202-2> ?p ?o }
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- 0167-9317(95)00202-2 author "Chen, H.Y.; Mayhew, N.; Paige, E.G.S.; Yang, G.G.".
- 0167-9317(95)00202-2 doi "10.1016/0167-931700202-2".
- 0167-9317(95)00202-2 isCitedBy Ted_Paige.
- 0167-9317(95)00202-2 issue "1-4".
- 0167-9317(95)00202-2 journal "Microelectronic Engineering".
- 0167-9317(95)00202-2 pages "95–98".
- 0167-9317(95)00202-2 title "Enhancement of submicron optical lithography performance using phase-only pupil filters".
- 0167-9317(95)00202-2 volume "30".
- 0167-9317(95)00202-2 year "1996".