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- 2005_04e_05.pdf accessdate "2006-09-02".
- 2005_04e_05.pdf first "Teruhisa".
- 2005_04e_05.pdf isCitedBy Tantalum_nitride.
- 2005_04e_05.pdf last "Akashi".
- 2005_04e_05.pdf title "Fabrication of a Tantalum-Nitride Thin-Film Resistor with a Low-Variability Resistance".
- 2005_04e_05.pdf url 2005_04e_05.pdf.
- 2005_04e_05.pdf year "2005".