Matches in DBpedia 2016-04 for { <http://www.sciencedirect.com/science/article/B6TVV-4SR710C-9/2/0d92f83e7fa815af84f215a4933da133> ?p ?o }
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- 0d92f83e7fa815af84f215a4933da133 author "M. Eichler and B. Michel and M. Thomas and M. Gabriel and C.-P. Klages".
- 0d92f83e7fa815af84f215a4933da133 isCitedBy Plasma-activated_bonding.
- 0d92f83e7fa815af84f215a4933da133 journal "Surface and Coatings Technology".
- 0d92f83e7fa815af84f215a4933da133 number "5-7".
- 0d92f83e7fa815af84f215a4933da133 pages "826–829".
- 0d92f83e7fa815af84f215a4933da133 title "Atmospheric-pressure plasma pretreatment for direct bonding of silicon wafers at low temperatures".
- 0d92f83e7fa815af84f215a4933da133 url 0d92f83e7fa815af84f215a4933da133.
- 0d92f83e7fa815af84f215a4933da133 volume "203".
- 0d92f83e7fa815af84f215a4933da133 year "2008".