Matches in DBpedia 2016-04 for { <http://www.eng.auburn.edu/~tzengy/Publications/Plasma%20Lab%20Publications/Dry%20etching%20of%20silicon%20materials%20in%20SF6%20based%20plasma.pdf> ?p ?o }
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- Dry%20etching%20of%20silicon%20materials%20in%20SF6%20based%20plasma.pdf accessdate "2013-02-22".
- Dry%20etching%20of%20silicon%20materials%20in%20SF6%20based%20plasma.pdf author "Y. Tzeng and T.H. Lin".
- Dry%20etching%20of%20silicon%20materials%20in%20SF6%20based%20plasma.pdf date "September 1987".
- Dry%20etching%20of%20silicon%20materials%20in%20SF6%20based%20plasma.pdf isCitedBy Sulfur_hexafluoride.
- Dry%20etching%20of%20silicon%20materials%20in%20SF6%20based%20plasma.pdf publisher "Journal of the Electrochemical Society".
- Dry%20etching%20of%20silicon%20materials%20in%20SF6%20based%20plasma.pdf title "Dry Etching of Silicon Materials in Based Plasmas".
- Dry%20etching%20of%20silicon%20materials%20in%20SF6%20based%20plasma.pdf url Dry%20etching%20of%20silicon%20materials%20in%20SF6%20based%20plasma.pdf.