Matches in DBpedia 2016-04 for { <http://doi.org/10.7567/jjap.52.105201> ?p ?o }
Showing triples 1 to 8 of
8
with 100 triples per page.
- jjap.52.105201 author "Yasuaki Ootera, Katsuya Sugawara, Masahiro Kanamaru, Ryousuke Yamamoto, Yoshiaki Kawamonzen, Naoko Kihara, Yoshiyuki Kamata and Akira Kikitsu".
- jjap.52.105201 doi "10.7567/JJAP.52.105201".
- jjap.52.105201 isCitedBy Nanoimprint_lithography.
- jjap.52.105201 journal "Japanese Journal of Applied Physics".
- jjap.52.105201 pages "105201".
- jjap.52.105201 title "Nanoimprint Lithography of 20-nm-Pitch Dot Array Pattern Using Tone Reversal Process".
- jjap.52.105201 url "http://iopscience.iop.org/article/10.7567/JJAP.52.105201/meta;jsessionid=4F85C3FC0CA56EA6075CFCEE20AF951B.c1".
- jjap.52.105201 volume "52".