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- 1.1425263 author1 "Matsui, Y".
- 1.1425263 author2 "Hiratani, M".
- 1.1425263 author3 "Nabatame, T".
- 1.1425263 author4 "Shimamoto, Y".
- 1.1425263 author5 "Kimura, S".
- 1.1425263 doi "10.1149/1.1425263".
- 1.1425263 isCitedBy Chemical_vapor_deposition_of_ruthenium.
- 1.1425263 issue "1".
- 1.1425263 journal "Electrochemical and Solid-State Letters".
- 1.1425263 pages "18.0".
- 1.1425263 title "Characteristics of Ruthenium Films Prepared by Chemical Vapor Deposition Using Bisruthenium Precursor".
- 1.1425263 volume "5".
- 1.1425263 year "2002".