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- rd.324.0502 doi "10.1147/rd.324.0502".
- rd.324.0502 first1 "A. N.".
- rd.324.0502 isCitedBy Alec_Broers,_Baron_Broers.
- rd.324.0502 issue "4".
- rd.324.0502 journal "IBM Journal of Research and Development".
- rd.324.0502 last1 "Broers".
- rd.324.0502 pages "502".
- rd.324.0502 title "Resolution limits for electron-beam lithography".
- rd.324.0502 volume "32".
- rd.324.0502 year "1988".