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- jjap.41.l347 author1 "Kadoshima, M".
- jjap.41.l347 author2 "Nabatame, T".
- jjap.41.l347 author3 "Hiratani, M".
- jjap.41.l347 author4 "Nakamura, Y".
- jjap.41.l347 author5 "Asano, I".
- jjap.41.l347 author6 "Suzuki, T".
- jjap.41.l347 doi "10.1143/JJAP.41.L347".
- jjap.41.l347 isCitedBy Chemical_vapor_deposition_of_ruthenium.
- jjap.41.l347 issue "3.0".
- jjap.41.l347 journal "Japanese Journal of Applied Physics".
- jjap.41.l347 pages "L347–L350".
- jjap.41.l347 title "Ruthenium Films Prepared by Liquid Source Metalorganic Chemical Vapor Deposition Using Dissolved with Tetrahydrofuran Solvent".
- jjap.41.l347 volume "41".
- jjap.41.l347 year "2002".