Matches in DBpedia 2016-04 for { <http://doi.org/10.1143/jjap.41.l287> ?p ?o }
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- jjap.41.l287 authorlink1 "Takahiro Shinada".
- jjap.41.l287 authorlink2 "Hikaru Koyama".
- jjap.41.l287 authorlink3 "Chie Hinoshita".
- jjap.41.l287 authorlink4 "Ken Imamura".
- jjap.41.l287 authorlink5 "Iwao Ohdomari".
- jjap.41.l287 doi "10.1143/JJAP.41.L287".
- jjap.41.l287 first1 "Takahiro".
- jjap.41.l287 first2 "Hikaru".
- jjap.41.l287 first3 "Chie".
- jjap.41.l287 first4 "Ken".
- jjap.41.l287 first5 "Iwao".
- jjap.41.l287 isCitedBy A&D_Company.
- jjap.41.l287 issn "0021-4922".
- jjap.41.l287 issue "3.0".
- jjap.41.l287 journal Japanese_Journal_of_Applied_Physics.
- jjap.41.l287 last1 "Shinada".
- jjap.41.l287 last2 "Koyama".
- jjap.41.l287 last3 "Hinoshita".
- jjap.41.l287 last4 "Imamura".
- jjap.41.l287 last5 "Ohdomari".
- jjap.41.l287 pages "L287–L290".
- jjap.41.l287 publisher Institute_of_Pure_and_Applied_Physics.
- jjap.41.l287 title "Improvement of Focused Ion-Beam Optics in Single-Ion Implantation for Higher Aiming Precision of One-by-One Doping of Impurity Atoms into Nano-Scale Semiconductor Devices".
- jjap.41.l287 url L287.
- jjap.41.l287 volume "41".
- jjap.41.l287 year "2002".