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- 12.879069 doi "10.1117/12.879069".
- 12.879069 first1 "T.".
- 12.879069 first2 "T.".
- 12.879069 first3 "H.".
- 12.879069 first4 "A.".
- 12.879069 isCitedBy Microscanner.
- 12.879069 journal "Proc. SPIE".
- 12.879069 last1 "Sandner".
- 12.879069 last2 "Grasshoff".
- 12.879069 last3 "Schenk".
- 12.879069 last4 "Kenda".
- 12.879069 pages "79300I".
- 12.879069 title "Out-Of-Plane Translatory MEMS actuator with extraordinary large stroke for optical path length modulation".
- 12.879069 volume "7930 – MOEMS and Miniaturized Systems X".
- 12.879069 year "2011".