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- 12.848318 displayAuthors "etal".
- 12.848318 doi "10.1117/12.848318".
- 12.848318 first "R. W.".
- 12.848318 isCitedBy Extreme_ultraviolet_lithography.
- 12.848318 journal "Proc. SPIE".
- 12.848318 last "Coons".
- 12.848318 pages "763636".
- 12.848318 title "Comparison of EUV spectral and ion emission features from laser-produced Sn and Li plasmas".
- 12.848318 volume "7636".
- 12.848318 year "2010".