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- 12.848194 displayAuthors "etal".
- 12.848194 doi "10.1117/12.848194".
- 12.848194 first "M-S.".
- 12.848194 isCitedBy 14_nanometer.
- 12.848194 journal "Proc. SPIE".
- 12.848194 last "Noh".
- 12.848194 pages "76400.0".
- 12.848194 title "Implementing and validating double patterning in 22-nm to 16-nm product design and patterning flows".
- 12.848194 volume "7640".
- 12.848194 year "2010".