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- 12.846677 displayAuthors "etal".
- 12.846677 doi "10.1117/12.846677".
- 12.846677 first "V.".
- 12.846677 isCitedBy 14_nanometer.
- 12.846677 last "Axelrad".
- 12.846677 pages "764109".
- 12.846677 title "16nm with 193nm immersion lithography and double exposure".
- 12.846677 volume "7641".
- 12.846677 work "Proc. SPIE".
- 12.846677 year "2010".