Matches in DBpedia 2016-04 for { <http://doi.org/10.1117/12.483602> ?p ?o }
Showing triples 1 to 9 of
9
with 100 triples per page.
- 12.483602 doi "10.1117/12.483602".
- 12.483602 first "F. T.".
- 12.483602 isCitedBy Extreme_ultraviolet_lithography.
- 12.483602 journal "Proc. SPIE".
- 12.483602 last "Chen".
- 12.483602 pages "347".
- 12.483602 title "Asymmetry and thickness effects in reflective EUV masks".
- 12.483602 volume "5037".
- 12.483602 year "2003".