Matches in DBpedia 2016-04 for { <http://doi.org/10.1117/12.388304> ?p ?o }
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- 12.388304 author "S. Tagawa".
- 12.388304 displayAuthors "etal".
- 12.388304 doi "10.1117/12.388304".
- 12.388304 isCitedBy Photoresist.
- 12.388304 journal "Proc. SPIE".
- 12.388304 page "204".
- 12.388304 title "Radiation and photochemistry of onium salt acid generators in chemically amplified resists".
- 12.388304 volume "3999".
- 12.388304 year "2000".