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- 12.388276 author "Ishii, Hiroyuki; Usui, Shinji; Douki, Katsuji; Kajita, Toru; Chawanya, Hitoshi; Shimokawa, Tsutomu".
- 12.388276 doi "10.1117/12.388276".
- 12.388276 isCitedBy Photoresist.
- 12.388276 journal "Proc. SPIE".
- 12.388276 page "1120".
- 12.388276 title "Design and lithographic performances of 193-specific photoacid generators".
- 12.388276 url 2000SPIEpaperPAG.pdf.
- 12.388276 volume "3999".