Matches in DBpedia 2016-04 for { <http://doi.org/10.1116/1.4901413> ?p ?o }
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- 1.4901413 accessDate "2015-05-06".
- 1.4901413 date "2015-03-01".
- 1.4901413 doi "10.1116/1.4901413".
- 1.4901413 first "Heiko".
- 1.4901413 first2 "Colin".
- 1.4901413 first3 "Philipp".
- 1.4901413 first4 "James L.".
- 1.4901413 first5 "Daniel J.".
- 1.4901413 first6 "Urs".
- 1.4901413 first7 "Armin W.".
- 1.4901413 isCitedBy Thermal_scanning_probe_lithography.
- 1.4901413 issn "2166-2746".
- 1.4901413 issue "2".
- 1.4901413 journal "Journal of Vacuum Science & Technology B".
- 1.4901413 last "Wolf".
- 1.4901413 last2 "Rawlings".
- 1.4901413 last3 "Mensch".
- 1.4901413 last4 "Hedrick".
- 1.4901413 last5 "Coady".
- 1.4901413 last6 "Duerig".
- 1.4901413 last7 "Knoll".
- 1.4901413 pages "02B102".
- 1.4901413 title "Sub-20 nm silicon patterning and metal lift-off using thermal scanning probe lithography".
- 1.4901413 url "http://scitation.aip.org/content/avs/journal/jvstb/33/2/10.1116/1.4901413".
- 1.4901413 volume "33".