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- 1.3532938 bibcode "2011JVSTB..29a1035T".
- 1.3532938 doi "10.1116/1.3532938".
- 1.3532938 first "A.".
- 1.3532938 first2 "S. N.".
- 1.3532938 first3 "M.".
- 1.3532938 first4 "R.".
- 1.3532938 first5 "T. C.".
- 1.3532938 isCitedBy Hydrogen_silsesquioxane.
- 1.3532938 issue "1".
- 1.3532938 journal Journal_of_Vacuum_Science_and_Technology_B.
- 1.3532938 last "Tavakkoli".
- 1.3532938 last2 "Piramanayagam".
- 1.3532938 last3 "Ranjbar".
- 1.3532938 last4 "Sbiaa".
- 1.3532938 last5 "Chong".
- 1.3532938 pages "011035".
- 1.3532938 title "Path to achieve sub-10-nm half-pitch using electron beam lithography".
- 1.3532938 volume "29".
- 1.3532938 year "2011".