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- 1.2151912 bibcode "2006JVSTB..24..316V".
- 1.2151912 doi "10.1116/1.2151912".
- 1.2151912 first1 "David".
- 1.2151912 first2 "Jeroen H.".
- 1.2151912 first3 "Thomas".
- 1.2151912 first4 "Robert L.".
- 1.2151912 first5 "Peter".
- 1.2151912 isCitedBy Photoresist.
- 1.2151912 journal "Journal of Vacuum Science and Technology B".
- 1.2151912 last1 "Van Steenwinckel".
- 1.2151912 last2 "Lammers".
- 1.2151912 last3 "Koehler".
- 1.2151912 last4 "Brainard".
- 1.2151912 last5 "Trefonas".
- 1.2151912 pages "316".
- 1.2151912 title "Resist effects at small pitches".
- 1.2151912 volume "24".
- 1.2151912 year "2006".