Matches in DBpedia 2016-04 for { <http://doi.org/10.1116/1.1396639> ?p ?o }
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- 1.1396639 author2 "You-Sheng Lin".
- 1.1396639 author3 "Karen Chu".
- 1.1396639 doi "10.1116/1.1396639".
- 1.1396639 first "Jane P.".
- 1.1396639 isCitedBy Zirconium_dioxide.
- 1.1396639 issue "5…".
- 1.1396639 journal Journal_of_Vacuum_Science_and_Technology_B.
- 1.1396639 last "Chang".
- 1.1396639 pages "1782–1787".
- 1.1396639 title "Rapid thermal chemical vapor deposition of zirconium oxide for metal-oxide-semiconductor field effect transistor application".
- 1.1396639 volume "19".
- 1.1396639 year "2001".