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- t-ed.1981.20599 doi "10.1109/T-ED.1981.20599".
- t-ed.1981.20599 first1 "A. N.".
- t-ed.1981.20599 isCitedBy Alec_Broers,_Baron_Broers.
- t-ed.1981.20599 issue "11".
- t-ed.1981.20599 journal "IEEE Transactions on Electron Devices".
- t-ed.1981.20599 last1 "Broers".
- t-ed.1981.20599 pages "1268".
- t-ed.1981.20599 title "Resolution, overlay, and field size for lithography systems".
- t-ed.1981.20599 volume "28".
- t-ed.1981.20599 year "1981".