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- sensor.1995.721827 accessdate "2014-11-09".
- sensor.1995.721827 date "June 1995".
- sensor.1995.721827 doi "10.1109/SENSOR.1995.721827".
- sensor.1995.721827 first1 "J.J.".
- sensor.1995.721827 first2 "M.F.".
- sensor.1995.721827 isCitedBy Nanoelectromechanical_relay.
- sensor.1995.721827 journal "Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on".
- sensor.1995.721827 last1 "Yao".
- sensor.1995.721827 last2 "Chang".
- sensor.1995.721827 pages "384–387".
- sensor.1995.721827 title "A Surface Micromachined Miniature Switch For Telecommunications Applications With Signal Frequencies From DC Up To 4 Ghz".
- sensor.1995.721827 url "http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=721827".
- sensor.1995.721827 volume "2".