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- 84.825770 author "Cheng, Y.T. and Lin, L. and Najafi, K.".
- 84.825770 doi "10.1109/84.825770".
- 84.825770 isCitedBy Eutectic_bonding.
- 84.825770 journal "Journal of Microelectromechanical Systems".
- 84.825770 number "1".
- 84.825770 pages "3–8".
- 84.825770 title "Localized silicon fusion and eutectic bonding for MEMS fabrication and packaging".
- 84.825770 volume "9".
- 84.825770 year "2000".