Matches in DBpedia 2016-04 for { <http://doi.org/10.1088/0022-3727/42/7/073001> ?p ?o }
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- 073001 author1 "E Langereis".
- 073001 author2 "S B S Heil".
- 073001 author3 "H C M Knoops".
- 073001 author4 "W Keuning".
- 073001 author5 "M C M van de Sanden".
- 073001 author6 "W M M Kessels".
- 073001 doi "10.1088/0022-3727/42/7/073001".
- 073001 isCitedBy Atomic_layer_deposition.
- 073001 journal "Journal of Physics D: Applied Physics".
- 073001 pages "1–19".
- 073001 title "In situ spectroscopic ellipsometry as a versatile tool for studying atomic layer deposition".
- 073001 volume "42".
- 073001 year "2009".