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- 10408439208244586 author "H. Windischman".
- 10408439208244586 bibcode "1992CRSSM..17..547W".
- 10408439208244586 date "1992".
- 10408439208244586 doi "10.1080/10408439208244586".
- 10408439208244586 isCitedBy Sputter_deposition.
- 10408439208244586 journal "Crit. Rev. Sol. St. Mat. Sci.".
- 10408439208244586 pages "547".
- 10408439208244586 title "Intrinsic stress in sputter-deposited thin film".
- 10408439208244586 volume "17".