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- ip-smt:20040405 doi "10.1049/ip-smt:20040405".
- ip-smt:20040405 first1 "S.".
- ip-smt:20040405 isCitedBy Radio_frequency_microelectromechanical_system.
- ip-smt:20040405 issn "1350-2344".
- ip-smt:20040405 issue "2".
- ip-smt:20040405 journal "IEE Proceedings - Science, Measurement and Technology".
- ip-smt:20040405 last1 "Lucyszyn".
- ip-smt:20040405 pages "93–103".
- ip-smt:20040405 title "Review of radio frequency microelectromechanical systems technology".
- ip-smt:20040405 volume "151".
- ip-smt:20040405 year "2004".