Matches in DBpedia 2016-04 for { <http://doi.org/10.1016/j.mee.2007.07.014> ?p ?o }
Showing triples 1 to 11 of
11
with 100 triples per page.
- j.mee.2007.07.014 displayAuthors "etal".
- j.mee.2007.07.014 doi "10.1016/j.mee.2007.07.014".
- j.mee.2007.07.014 first "T.".
- j.mee.2007.07.014 isCitedBy 14_nanometer.
- j.mee.2007.07.014 issue "2".
- j.mee.2007.07.014 journal "Microelectronic Engineering".
- j.mee.2007.07.014 last "Gross".
- j.mee.2007.07.014 pages "401–407".
- j.mee.2007.07.014 title "Detection of nanoscale etch and ash damage to nanoporous methyl silsesquioxane using electrostatic force microscopy".
- j.mee.2007.07.014 volume "85".
- j.mee.2007.07.014 year "2008".