Matches in DBpedia 2016-04 for { <http://dbpedia.org/resource/Plasma-immersion_ion_implantation> ?p ?o }
Showing triples 1 to 85 of
85
with 100 triples per page.
- Plasma-immersion_ion_implantation abstract "Plasma-immersion ion implantation (PIII) or pulsed-plasma doping (pulsed PIII) is a surface modification technique of extracting the accelerated ions from the plasma by applying a high voltage pulsed DC or pure DC power supply and targeting them into a suitable substrate or electrode with a semiconductor wafer placed over it, so as to implant it with suitable dopants. The electrode is a cathode for an electropositive plasma, while it is an anode for an electronegative plasma. Plasma can be generated in a suitably designed vacuum chamber with the help of various plasma sources such as Electron Cyclotron Resonance plasma source which yields plasma with the highest ion density and lowest contamination level, helicon plasma source, capacitively coupled plasma source, inductively coupled plasma source, DC glow discharge and metal vapor arc(for metallic species). The vacuum chamber can be of two types - diode and triode type depending upon whether the power supply is applied to the substrate as in the former case or to the perforated grid as in the latter.".
- Plasma-immersion_ion_implantation thumbnail PiiiD_Knee_AgTarget_IOT.jpg?width=300.
- Plasma-immersion_ion_implantation wikiPageID "13871411".
- Plasma-immersion_ion_implantation wikiPageLength "5726".
- Plasma-immersion_ion_implantation wikiPageOutDegree "62".
- Plasma-immersion_ion_implantation wikiPageRevisionID "668177075".
- Plasma-immersion_ion_implantation wikiPageWikiLink Afterglow.
- Plasma-immersion_ion_implantation wikiPageWikiLink Anode.
- Plasma-immersion_ion_implantation wikiPageWikiLink Beam_steering.
- Plasma-immersion_ion_implantation wikiPageWikiLink Capacitively_coupled_plasma.
- Plasma-immersion_ion_implantation wikiPageWikiLink Category:Plasma_physics.
- Plasma-immersion_ion_implantation wikiPageWikiLink Category:Semiconductor_device_fabrication.
- Plasma-immersion_ion_implantation wikiPageWikiLink Category:Thin_films.
- Plasma-immersion_ion_implantation wikiPageWikiLink Cathode.
- Plasma-immersion_ion_implantation wikiPageWikiLink Coating.
- Plasma-immersion_ion_implantation wikiPageWikiLink Debye_sheath.
- Plasma-immersion_ion_implantation wikiPageWikiLink Diode.
- Plasma-immersion_ion_implantation wikiPageWikiLink Direct_current.
- Plasma-immersion_ion_implantation wikiPageWikiLink Dopant.
- Plasma-immersion_ion_implantation wikiPageWikiLink Electric_arc.
- Plasma-immersion_ion_implantation wikiPageWikiLink Electric_charge.
- Plasma-immersion_ion_implantation wikiPageWikiLink Electric_field.
- Plasma-immersion_ion_implantation wikiPageWikiLink Electrode.
- Plasma-immersion_ion_implantation wikiPageWikiLink Electron.
- Plasma-immersion_ion_implantation wikiPageWikiLink Electron_cyclotron_resonance.
- Plasma-immersion_ion_implantation wikiPageWikiLink Electronegative_plasma.
- Plasma-immersion_ion_implantation wikiPageWikiLink Electronegativity.
- Plasma-immersion_ion_implantation wikiPageWikiLink Electropositive_plasma.
- Plasma-immersion_ion_implantation wikiPageWikiLink File:PIII.jpg.
- Plasma-immersion_ion_implantation wikiPageWikiLink Focusing_(disambiguation).
- Plasma-immersion_ion_implantation wikiPageWikiLink Gas.
- Plasma-immersion_ion_implantation wikiPageWikiLink Glow_discharge.
- Plasma-immersion_ion_implantation wikiPageWikiLink Grid_(graphic_design).
- Plasma-immersion_ion_implantation wikiPageWikiLink Helicon_plasma.
- Plasma-immersion_ion_implantation wikiPageWikiLink High_voltage.
- Plasma-immersion_ion_implantation wikiPageWikiLink Inductively_coupled_plasma.
- Plasma-immersion_ion_implantation wikiPageWikiLink Insulator_(electricity).
- Plasma-immersion_ion_implantation wikiPageWikiLink Ion_implantation.
- Plasma-immersion_ion_implantation wikiPageWikiLink List_of_plasma_(physics)_articles.
- Plasma-immersion_ion_implantation wikiPageWikiLink Metal.
- Plasma-immersion_ion_implantation wikiPageWikiLink Negative_number.
- Plasma-immersion_ion_implantation wikiPageWikiLink Neutralization_(chemistry).
- Plasma-immersion_ion_implantation wikiPageWikiLink Perforation.
- Plasma-immersion_ion_implantation wikiPageWikiLink Potential.
- Plasma-immersion_ion_implantation wikiPageWikiLink Power_supply.
- Plasma-immersion_ion_implantation wikiPageWikiLink Pressure.
- Plasma-immersion_ion_implantation wikiPageWikiLink Pulsed_DC.
- Plasma-immersion_ion_implantation wikiPageWikiLink Pump.
- Plasma-immersion_ion_implantation wikiPageWikiLink Resultant.
- Plasma-immersion_ion_implantation wikiPageWikiLink Surface.
- Plasma-immersion_ion_implantation wikiPageWikiLink Thermodynamic_system.
- Plasma-immersion_ion_implantation wikiPageWikiLink Time.
- Plasma-immersion_ion_implantation wikiPageWikiLink Torr.
- Plasma-immersion_ion_implantation wikiPageWikiLink Triode.
- Plasma-immersion_ion_implantation wikiPageWikiLink Vacuum_chamber.
- Plasma-immersion_ion_implantation wikiPageWikiLink Voltage.
- Plasma-immersion_ion_implantation wikiPageWikiLink Wafer_(electronics).
- Plasma-immersion_ion_implantation wikiPageWikiLink Category:Reactive-ion_etching.
- Plasma-immersion_ion_implantation wikiPageWikiLink File:PiiiD_Knee_AgTarget_IOT.jpg.
- Plasma-immersion_ion_implantation wikiPageWikiLinkText "Plasma-immersion ion implantation".
- Plasma-immersion_ion_implantation wikiPageWikiLinkText "plasma assisted ion implantation".
- Plasma-immersion_ion_implantation wikiPageUsesTemplate Template:Disambiguation_needed.
- Plasma-immersion_ion_implantation wikiPageUsesTemplate Template:Reflist.
- Plasma-immersion_ion_implantation subject Category:Plasma_physics.
- Plasma-immersion_ion_implantation subject Category:Semiconductor_device_fabrication.
- Plasma-immersion_ion_implantation subject Category:Thin_films.
- Plasma-immersion_ion_implantation subject Category:Reactive-ion_etching.
- Plasma-immersion_ion_implantation hypernym Technique.
- Plasma-immersion_ion_implantation type Film.
- Plasma-immersion_ion_implantation type TopicalConcept.
- Plasma-immersion_ion_implantation type Astrophysic.
- Plasma-immersion_ion_implantation type Film.
- Plasma-immersion_ion_implantation type Physic.
- Plasma-immersion_ion_implantation type Process.
- Plasma-immersion_ion_implantation type Semiconductor.
- Plasma-immersion_ion_implantation comment "Plasma-immersion ion implantation (PIII) or pulsed-plasma doping (pulsed PIII) is a surface modification technique of extracting the accelerated ions from the plasma by applying a high voltage pulsed DC or pure DC power supply and targeting them into a suitable substrate or electrode with a semiconductor wafer placed over it, so as to implant it with suitable dopants. The electrode is a cathode for an electropositive plasma, while it is an anode for an electronegative plasma.".
- Plasma-immersion_ion_implantation label "Plasma-immersion ion implantation".
- Plasma-immersion_ion_implantation sameAs Q2098457.
- Plasma-immersion_ion_implantation sameAs Plasma-Immersions-Ionenimplantation.
- Plasma-immersion_ion_implantation sameAs m.03clt04.
- Plasma-immersion_ion_implantation sameAs Q2098457.
- Plasma-immersion_ion_implantation sameAs 等离子体浸没离子注入.
- Plasma-immersion_ion_implantation wasDerivedFrom Plasma-immersion_ion_implantation?oldid=668177075.
- Plasma-immersion_ion_implantation depiction PiiiD_Knee_AgTarget_IOT.jpg.
- Plasma-immersion_ion_implantation isPrimaryTopicOf Plasma-immersion_ion_implantation.