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- Off-axis_illumination abstract "In photolithography, off-axis illumination is an optical system setup in which the incoming light strikes the photomask at an oblique angle rather than perpendicularly to it, that is to say, the incident light is not parallel to the axis of the optical system. The advantages of off-axis illumination can be explained in the context where the pattern on the photomask is a diffraction grating with a small pitch. The light that strikes the grating is diffracted in various directions. If the incident light is at a normal angle (along the axis of the optical system), then the zero-th diffracted order continues to be along the optical system axis, while the other orders are diffracted sideways, with the amount of deviation increasing as the pitch of the grating is decreasing. For sufficiently small pitch, only the zero-th diffraction order manages to make it through the projection lens, with the other orders being lost. The result is that no pattern is created on the wafer, since the zero-th diffraction order only contains the average of the photomask pattern.By making the illumination off-axis, all the diffraction orders are tilted, which makes it more likely that the higher diffraction orders can make it through the projection lens and help form the image of the mask onto the wafer.".
- Off-axis_illumination wikiPageID "24834390".
- Off-axis_illumination wikiPageLength "1366".
- Off-axis_illumination wikiPageOutDegree "4".
- Off-axis_illumination wikiPageRevisionID "545757652".
- Off-axis_illumination wikiPageWikiLink Category:Lithography_(microfabrication).
- Off-axis_illumination wikiPageWikiLink Diffraction_grating.
- Off-axis_illumination wikiPageWikiLink Photolithography.
- Off-axis_illumination wikiPageWikiLink Photomask.
- Off-axis_illumination wikiPageWikiLinkText "off-axis illumination".
- Off-axis_illumination wikiPageWikiLinkText "off-axis".
- Off-axis_illumination subject Category:Lithography_(microfabrication).
- Off-axis_illumination hypernym Setup.
- Off-axis_illumination type Organisation.
- Off-axis_illumination type Process.
- Off-axis_illumination comment "In photolithography, off-axis illumination is an optical system setup in which the incoming light strikes the photomask at an oblique angle rather than perpendicularly to it, that is to say, the incident light is not parallel to the axis of the optical system. The advantages of off-axis illumination can be explained in the context where the pattern on the photomask is a diffraction grating with a small pitch. The light that strikes the grating is diffracted in various directions.".
- Off-axis_illumination label "Off-axis illumination".
- Off-axis_illumination sameAs Q2250276.
- Off-axis_illumination sameAs Schrägbeleuchtung.
- Off-axis_illumination sameAs m.0808pp_.
- Off-axis_illumination sameAs Q2250276.
- Off-axis_illumination wasDerivedFrom Off-axis_illumination?oldid=545757652.
- Off-axis_illumination isPrimaryTopicOf Off-axis_illumination.