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- Multiple_patterning abstract "Multiple patterning (or multi-patterning) is a class of technologies for manufacturing integrated circuits (ICs), developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of features. There are several types of double patterning. In combination, or by extension, these may be used for multiple patterning.There have been numerous concerns that multiple patterning diminishes or even reverses the node-to-node cost reduction expected with Moore's Law. One or two 193i exposures can scale down to 7nm node. The only known technique for single exposure 5nm node patterning is self-aligned multiple patterning enabled by sidewall profile modulation (to be discussed below); otherwise, even a conventional EUV exposure is not sufficient. Extra cost at 7nm node is anticipated from replacement of a single 193i exposure by EUV or two 193i exposures. EUV is more expensive than two 193i exposures since EUV is more liable to print smaller mask defects not resolvable by 193i. 5nm node adds even more exposure costs.".
- Multiple_patterning thumbnail SPIMM_SASP.png?width=300.
- Multiple_patterning wikiPageExternalLink showArticle.jhtml?articleID=206903526&cid=RSSfeed_eetimes_newsRSS.
- Multiple_patterning wikiPageExternalLink CA604512.
- Multiple_patterning wikiPageExternalLink resists.html.
- Multiple_patterning wikiPageID "7908943".
- Multiple_patterning wikiPageLength "49005".
- Multiple_patterning wikiPageOutDegree "57".
- Multiple_patterning wikiPageRevisionID "707816083".
- Multiple_patterning wikiPageWikiLink 45_nanometer.
- Multiple_patterning wikiPageWikiLink 65_nanometer.
- Multiple_patterning wikiPageWikiLink ASML_Holding.
- Multiple_patterning wikiPageWikiLink Belgium.
- Multiple_patterning wikiPageWikiLink Category:Lithography_(microfabrication).
- Multiple_patterning wikiPageWikiLink Close-packing_of_equal_spheres.
- Multiple_patterning wikiPageWikiLink Dynamic_random-access_memory.
- Multiple_patterning wikiPageWikiLink Electron-beam_lithography.
- Multiple_patterning wikiPageWikiLink Extreme_ultraviolet_lithography.
- Multiple_patterning wikiPageWikiLink File:2-mask_SATP.png.
- Multiple_patterning wikiPageWikiLink File:2D_SID_spacer_patterning.png.
- Multiple_patterning wikiPageWikiLink File:Chemoepitaxy.png.
- Multiple_patterning wikiPageWikiLink File:Directed_self-assembly_representation.png.
- Multiple_patterning wikiPageWikiLink File:Double-dipole_lithography.png.
- Multiple_patterning wikiPageWikiLink File:Grayscale_mask.png.
- Multiple_patterning wikiPageWikiLink File:Hole_shrink_cut.png.
- Multiple_patterning wikiPageWikiLink File:Hole_shrink_separation.png.
- Multiple_patterning wikiPageWikiLink File:SID_SADP_array.png.
- Multiple_patterning wikiPageWikiLink File:SPIMM_SASP.png.
- Multiple_patterning wikiPageWikiLink File:Self-aligned_via_patterning.png.
- Multiple_patterning wikiPageWikiLink Flash_memory.
- Multiple_patterning wikiPageWikiLink Hardmask.
- Multiple_patterning wikiPageWikiLink IMEC.
- Multiple_patterning wikiPageWikiLink Intel.
- Multiple_patterning wikiPageWikiLink Maskless_lithography.
- Multiple_patterning wikiPageWikiLink Moores_law.
- Multiple_patterning wikiPageWikiLink Multigate_device.
- Multiple_patterning wikiPageWikiLink Nanoimprint_lithography.
- Multiple_patterning wikiPageWikiLink Next-generation_lithography.
- Multiple_patterning wikiPageWikiLink Phase-shift_mask.
- Multiple_patterning wikiPageWikiLink Photolithography.
- Multiple_patterning wikiPageWikiLink Photomask.
- Multiple_patterning wikiPageWikiLink Photoresist.
- Multiple_patterning wikiPageWikiLink Semiconductor_Manufacturing_International_Corporation.
- Multiple_patterning wikiPageWikiLink Spacer_patterning.
- Multiple_patterning wikiPageWikiLink Synopsys.
- Multiple_patterning wikiPageWikiLink Three-dimensional_integrated_circuit.
- Multiple_patterning wikiPageWikiLink Through-silicon_via.
- Multiple_patterning wikiPageWikiLink File:Double_Exposure.JPG.
- Multiple_patterning wikiPageWikiLink File:Dual-Tone_Develop.PNG.
- Multiple_patterning wikiPageWikiLink File:Dual-Tone_Photoresist.png.
- Multiple_patterning wikiPageWikiLink File:LELELE_triple_patterning.png.
- Multiple_patterning wikiPageWikiLink File:Line_doubling.svg.
- Multiple_patterning wikiPageWikiLink File:SADP_then_SATP.png.
- Multiple_patterning wikiPageWikiLink File:SID_SADP_uncut.png.
- Multiple_patterning wikiPageWikiLink File:Spacer_Patterning.JPG.
- Multiple_patterning wikiPageWikiLink File:Spacer_Quadrupling.PNG.
- Multiple_patterning wikiPageWikiLink File:Trench_doubling.svg.
- Multiple_patterning wikiPageWikiLinkText "Double exposure patterning".
- Multiple_patterning wikiPageWikiLinkText "Multiple patterning".
- Multiple_patterning wikiPageWikiLinkText "directed self-assembly".
- Multiple_patterning wikiPageWikiLinkText "multiple layer patterning".
- Multiple_patterning wikiPageWikiLinkText "multiple patterning".
- Multiple_patterning wikiPageUsesTemplate Template:Citation_needed.
- Multiple_patterning wikiPageUsesTemplate Template:Reflist.
- Multiple_patterning wikiPageUsesTemplate Template:Who.
- Multiple_patterning subject Category:Lithography_(microfabrication).
- Multiple_patterning hypernym Technologies.
- Multiple_patterning type ProgrammingLanguage.
- Multiple_patterning type Process.
- Multiple_patterning comment "Multiple patterning (or multi-patterning) is a class of technologies for manufacturing integrated circuits (ICs), developed for photolithography to enhance the feature density. The simplest case of multiple patterning is double patterning, where a conventional lithography process is enhanced to produce double the expected number of features. There are several types of double patterning.".
- Multiple_patterning label "Multiple patterning".
- Multiple_patterning sameAs Q1917460.
- Multiple_patterning sameAs Mehrfachstrukturierung.
- Multiple_patterning sameAs m.026jnnq.
- Multiple_patterning sameAs Q1917460.
- Multiple_patterning wasDerivedFrom Multiple_patterning?oldid=707816083.
- Multiple_patterning depiction SPIMM_SASP.png.
- Multiple_patterning isPrimaryTopicOf Multiple_patterning.
