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- 883c9ae32a45eb9974bbeb25e23f53d14509987fc9cfe675efdf2fe76910923a date "Nov 11, 1977".
- 883c9ae32a45eb9974bbeb25e23f53d14509987fc9cfe675efdf2fe76910923a isCitedBy Plasma_etching.
- 883c9ae32a45eb9974bbeb25e23f53d14509987fc9cfe675efdf2fe76910923a journal "Japanese Journal of Applied Physics".
- 883c9ae32a45eb9974bbeb25e23f53d14509987fc9cfe675efdf2fe76910923a last "Keizo Suzuki, Sadayuki Okudaira, Norriyuki Sakudo, Ichiro Kanomata".
- 883c9ae32a45eb9974bbeb25e23f53d14509987fc9cfe675efdf2fe76910923a title "Microwave Plasma Etching".