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- 2031a68b83e8ad63ef1722d976e81a020863528734b5c73013836c038605b84e country "US".
- 2031a68b83e8ad63ef1722d976e81a020863528734b5c73013836c038605b84e gdate "2003-04-08".
- 2031a68b83e8ad63ef1722d976e81a020863528734b5c73013836c038605b84e isCitedBy Tungsten_hexafluoride.
- 2031a68b83e8ad63ef1722d976e81a020863528734b5c73013836c038605b84e number "6544889".
- 2031a68b83e8ad63ef1722d976e81a020863528734b5c73013836c038605b84e status "patent".
- 2031a68b83e8ad63ef1722d976e81a020863528734b5c73013836c038605b84e title "Method for tungsten chemical vapor deposition on a semiconductor substrate".