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- j.tsf.2006.06.015 author "J. Alami, P. Eklund, J. Emmerlich, O. Wilhelmsson, U. Jansson, H. Högberg, L. Hultman, and U. Helmersson".
- j.tsf.2006.06.015 date "2006-12-05".
- j.tsf.2006.06.015 doi "10.1016/j.tsf.2006.06.015".
- j.tsf.2006.06.015 isCitedBy High-power_impulse_magnetron_sputtering.
- j.tsf.2006.06.015 issue "4".
- j.tsf.2006.06.015 journal "Thin Solid Films".
- j.tsf.2006.06.015 pages "1731–1736".
- j.tsf.2006.06.015 publisher "Elsevier B.V.".
- j.tsf.2006.06.015 title "High-power impulse magnetron sputtering of Ti–Si–C thin films from a Ti3SiC2 compound target".
- j.tsf.2006.06.015 volume "515".