Matches in DBpedia 2015-10 for { <http://dbpedia.org/resource/Photolithography> ?p ?o }
- Photolithography abstract "Photolithography, also termed optical lithography or UV lithography, is a process used in microfabrication to pattern parts of a thin film or the bulk of a substrate. It uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical "photoresist", or simply "resist," on the substrate. A series of chemical treatments then either engraves the exposure pattern into, or enables deposition of a new material in the desired pattern upon, the material underneath the photo resist. For example, in complex integrated circuits, a modern CMOS wafer will go through the photolithographic cycle up to 50 times.Photolithography shares some fundamental principles with photography in that the pattern in the etching resist is created by exposing it to light, either directly (without using a mask) or with a projected image using an optical mask. This procedure is comparable to a high precision version of the method used to make printed circuit boards. Subsequent stages in the process have more in common with etching than with lithographic printing. It is used because it can create extremely small patterns (down to a few tens of nanometers in size), it affords exact control over the shape and size of the objects it creates, and because it can create patterns over an entire surface cost-effectively. Its main disadvantages are that it requires a flat substrate to start with, it is not very effective at creating shapes that are not flat, and it can require extremely clean operating conditions.".
- Photolithography thumbnail Photolithography_etching_process.svg?width=300.
- Photolithography wikiPageExternalLink Article_Display.cfm?Section=ARCHI&Subsection=Display&ARTICLE_ID=205024&p=28.
- Photolithography wikiPageExternalLink lithography.phtml.
- Photolithography wikiPageExternalLink lithobasics.html.
- Photolithography wikiPageExternalLink chiu.html.
- Photolithography wikiPageID "23748".
- Photolithography wikiPageLength "27655".
- Photolithography wikiPageOutDegree "105".
- Photolithography wikiPageRevisionID "681853432".
- Photolithography wikiPageWikiLink Anisotropic.
- Photolithography wikiPageWikiLink Anisotropy.
- Photolithography wikiPageWikiLink Argon_fluoride_laser.
- Photolithography wikiPageWikiLink Bis(trimethylsilyl)amine.
- Photolithography wikiPageWikiLink Bitumen_of_Judea.
- Photolithography wikiPageWikiLink CMOS.
- Photolithography wikiPageWikiLink Category:Lithography_(microfabrication).
- Photolithography wikiPageWikiLink Category:Microtechnology.
- Photolithography wikiPageWikiLink Chemical-mechanical_planarization.
- Photolithography wikiPageWikiLink Chemical_engineering.
- Photolithography wikiPageWikiLink Chemical_lithography.
- Photolithography wikiPageWikiLink Chemical_mechanical_polishing.
- Photolithography wikiPageWikiLink Chemical_milling.
- Photolithography wikiPageWikiLink Chromium.
- Photolithography wikiPageWikiLink Computational_lithography.
- Photolithography wikiPageWikiLink Contamination.
- Photolithography wikiPageWikiLink Cymer,_Inc..
- Photolithography wikiPageWikiLink Cymer_Inc..
- Photolithography wikiPageWikiLink Deep_ultraviolet.
- Photolithography wikiPageWikiLink Depth_of_focus.
- Photolithography wikiPageWikiLink Diazonaphthoquinone.
- Photolithography wikiPageWikiLink Diffraction-limited_system.
- Photolithography wikiPageWikiLink Diffraction_limit.
- Photolithography wikiPageWikiLink Dip-pen_nanolithography.
- Photolithography wikiPageWikiLink Electrical_insulation.
- Photolithography wikiPageWikiLink Electron-beam_lithography.
- Photolithography wikiPageWikiLink Electron_beam_lithography.
- Photolithography wikiPageWikiLink Etching.
- Photolithography wikiPageWikiLink Excimer_laser.
- Photolithography wikiPageWikiLink Extreme_ultraviolet_lithography.
- Photolithography wikiPageWikiLink File:Lithography_Wavelength_vs_Resolution.PNG.
- Photolithography wikiPageWikiLink File:Photon_Energy_vs_Resolution.PNG.
- Photolithography wikiPageWikiLink Free-electron_laser.
- Photolithography wikiPageWikiLink Fused_quartz.
- Photolithography wikiPageWikiLink Gas.
- Photolithography wikiPageWikiLink Gas-discharge_lamp.
- Photolithography wikiPageWikiLink Geometry.
- Photolithography wikiPageWikiLink Gigaphoton_Inc..
- Photolithography wikiPageWikiLink Hydrogen_peroxide.
- Photolithography wikiPageWikiLink Immersion_lithography.
- Photolithography wikiPageWikiLink Industrial_robot.
- Photolithography wikiPageWikiLink Insulator_(electricity).
- Photolithography wikiPageWikiLink Integrated_circuit.
- Photolithography wikiPageWikiLink Interference_(wave_propagation).
- Photolithography wikiPageWikiLink Ion_beam_lithography.
- Photolithography wikiPageWikiLink Ion_implantation.
- Photolithography wikiPageWikiLink Ion_projection_lithography.
- Photolithography wikiPageWikiLink Krypton_difluoride.
- Photolithography wikiPageWikiLink Krypton_fluoride.
- Photolithography wikiPageWikiLink Light.
- Photolithography wikiPageWikiLink Liquid.
- Photolithography wikiPageWikiLink Lithographic_printing.
- Photolithography wikiPageWikiLink Lithography.
- Photolithography wikiPageWikiLink MOSFET.
- Photolithography wikiPageWikiLink Magnetolithography.
- Photolithography wikiPageWikiLink Maskless_lithography.
- Photolithography wikiPageWikiLink Mercury_(element).
- Photolithography wikiPageWikiLink Microelectromechanical_systems.
- Photolithography wikiPageWikiLink Microfabrication.
- Photolithography wikiPageWikiLink Moores_law.
- Photolithography wikiPageWikiLink Multiple_patterning.
- Photolithography wikiPageWikiLink N-Methyl-2-pyrrolidone.
- Photolithography wikiPageWikiLink Nanochannel_glass_materials.
- Photolithography wikiPageWikiLink Nanoimprint_lithography.
- Photolithography wikiPageWikiLink Nanometre.
- Photolithography wikiPageWikiLink Nicephore_Niepce.
- Photolithography wikiPageWikiLink Nicéphore_Niépce.
- Photolithography wikiPageWikiLink Noble_gas.
- Photolithography wikiPageWikiLink Numerical_aperture.
- Photolithography wikiPageWikiLink Optical_mask.
- Photolithography wikiPageWikiLink Oxygen.
- Photolithography wikiPageWikiLink Photographic_developer.
- Photolithography wikiPageWikiLink Photography.
- Photolithography wikiPageWikiLink Photomask.
- Photolithography wikiPageWikiLink Photoresist.
- Photolithography wikiPageWikiLink Photosensitive.
- Photolithography wikiPageWikiLink Photosensitivity.
- Photolithography wikiPageWikiLink Plasma_(physics).
- Photolithography wikiPageWikiLink Plasma_ashing.
- Photolithography wikiPageWikiLink Plasma_etching.
- Photolithography wikiPageWikiLink Printed_circuit_board.
- Photolithography wikiPageWikiLink RCA_clean.
- Photolithography wikiPageWikiLink Refractive_index.
- Photolithography wikiPageWikiLink Refractive_indices.
- Photolithography wikiPageWikiLink Resist.
- Photolithography wikiPageWikiLink Semiconductor_device_fabrication.
- Photolithography wikiPageWikiLink Semiconductor_fabrication.
- Photolithography wikiPageWikiLink Semiconductor_fabrication_plant.
- Photolithography wikiPageWikiLink Silicon_dioxide.
- Photolithography wikiPageWikiLink Sodium.