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• Microelectromechanical_systems abstract "Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or micro systems technology – MST (in Europe).MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e. 0.02 to 1.0 mm). They usually consist of a central unit that processes data (the microprocessor) and several components that interact with the surroundings such as microsensors. At these size scales, the standard constructs of classical physics are not always useful. Because of the large surface area to volume ratio of MEMS, surface effects such as electrostatics and wetting dominate over volume effects such as inertia or thermal mass.The potential of very small machines was appreciated before the technology existed that could make them (see, for example, Richard Feynman's famous 1959 lecture There's Plenty of Room at the Bottom). MEMS became practical once they could be fabricated using modified semiconductor device fabrication technologies, normally used to make electronics. These include molding and plating, wet etching (KOH, TMAH) and dry etching (RIE and DRIE), electro discharge machining (EDM), and other technologies capable of manufacturing small devices. An early example of a MEMS device is the resonistor – an electromechanical monolithic resonator.".
• Microelectromechanical_systems thumbnail MEMsfounding.jpg?width=300.
• Microelectromechanical_systems wikiPageExternalLink 180.
• Microelectromechanical_systems wikiPageID "19638".
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• Microelectromechanical_systems wikiPageRevisionID "683694319".
• Microelectromechanical_systems wikiPageWikiLink 1,000,000,000.
• Microelectromechanical_systems wikiPageWikiLink 1000000000000_(number).
• Microelectromechanical_systems wikiPageWikiLink 1000000000_(number).
• Microelectromechanical_systems wikiPageWikiLink Accelerometer.
• Microelectromechanical_systems wikiPageWikiLink Actuator.
• Microelectromechanical_systems wikiPageWikiLink Airbag.
• Microelectromechanical_systems wikiPageWikiLink Aircraft_principal_axes.
• Microelectromechanical_systems wikiPageWikiLink Aluminium.
• Microelectromechanical_systems wikiPageWikiLink Aluminium_nitride.
• Microelectromechanical_systems wikiPageWikiLink Analog_Devices.
• Microelectromechanical_systems wikiPageWikiLink Anodic_bonding.
• Microelectromechanical_systems wikiPageWikiLink Bio-MEMS.
• Microelectromechanical_systems wikiPageWikiLink Biosensor.
• Microelectromechanical_systems wikiPageWikiLink Blood_pressure.
• Microelectromechanical_systems wikiPageWikiLink Brain–computer_interface.
• Microelectromechanical_systems wikiPageWikiLink Buffered_oxide_etch.
• Microelectromechanical_systems wikiPageWikiLink Bulk_micromachining.
• Microelectromechanical_systems wikiPageWikiLink Canon_Digital_IXUS.
• Microelectromechanical_systems wikiPageWikiLink Cantilever.
• Microelectromechanical_systems wikiPageWikiLink Capacitive_Micromachined_Ultrasonic_Transducers.
• Microelectromechanical_systems wikiPageWikiLink Capacitive_micromachined_ultrasonic_transducers.
• Microelectromechanical_systems wikiPageWikiLink Category:Electrical_engineering.
• Microelectromechanical_systems wikiPageWikiLink Category:Mechanical_engineering.
• Microelectromechanical_systems wikiPageWikiLink Category:Microelectronic_and_microelectromechanical_systems.
• Microelectromechanical_systems wikiPageWikiLink Category:Microtechnology.
• Microelectromechanical_systems wikiPageWikiLink Category:Transducers.
• Microelectromechanical_systems wikiPageWikiLink Ceramic.
• Microelectromechanical_systems wikiPageWikiLink Chemical_vapor_deposition.
• Microelectromechanical_systems wikiPageWikiLink Chemoreceptor.
• Microelectromechanical_systems wikiPageWikiLink Chemosensor.
• Microelectromechanical_systems wikiPageWikiLink Chromium.
• Microelectromechanical_systems wikiPageWikiLink Classical_physics.
• Microelectromechanical_systems wikiPageWikiLink Cleanroom.
• Microelectromechanical_systems wikiPageWikiLink Copper.
• Microelectromechanical_systems wikiPageWikiLink Crystallography.
• Microelectromechanical_systems wikiPageWikiLink Data_communications.
• Microelectromechanical_systems wikiPageWikiLink Data_transmission.
• Microelectromechanical_systems wikiPageWikiLink Deep_reactive-ion_etching.
• Microelectromechanical_systems wikiPageWikiLink Deposition_(chemistry).
• Microelectromechanical_systems wikiPageWikiLink Die_(integrated_circuit).
• Microelectromechanical_systems wikiPageWikiLink Die_preparation.
• Microelectromechanical_systems wikiPageWikiLink Diffraction-limited_system.
• Microelectromechanical_systems wikiPageWikiLink Diffraction_limit.
• Microelectromechanical_systems wikiPageWikiLink Digital_Light_Processing.
• Microelectromechanical_systems wikiPageWikiLink Digital_micromirror_device.
• Microelectromechanical_systems wikiPageWikiLink Diode.
• Microelectromechanical_systems wikiPageWikiLink Display_device.
• Microelectromechanical_systems wikiPageWikiLink Dry_etching.
• Microelectromechanical_systems wikiPageWikiLink Dynamic_stability_control.
• Microelectromechanical_systems wikiPageWikiLink Economies_of_scale.
• Microelectromechanical_systems wikiPageWikiLink Elastic_modulus.
• Microelectromechanical_systems wikiPageWikiLink Electrical_conductivity.
• Microelectromechanical_systems wikiPageWikiLink Electrical_discharge_machining.
• Microelectromechanical_systems wikiPageWikiLink Electrical_resistivity_and_conductivity.
• Microelectromechanical_systems wikiPageWikiLink Electron.
• Microelectromechanical_systems wikiPageWikiLink Electronic_stability_control.
• Microelectromechanical_systems wikiPageWikiLink Electronics.
• Microelectromechanical_systems wikiPageWikiLink Electrostatic_fluid_accelerator.
• Microelectromechanical_systems wikiPageWikiLink Electrostatic_motor.
• Microelectromechanical_systems wikiPageWikiLink Electrostatics.
• Microelectromechanical_systems wikiPageWikiLink Embossing_(manufacturing).
• Microelectromechanical_systems wikiPageWikiLink Energy_harvesting.
• Microelectromechanical_systems wikiPageWikiLink Etching_(microfabrication).
• Microelectromechanical_systems wikiPageWikiLink Evaporation.
• Microelectromechanical_systems wikiPageWikiLink Fatigue_(material).
• Microelectromechanical_systems wikiPageWikiLink File:Labonachip20017-300.jpg.
• Microelectromechanical_systems wikiPageWikiLink Gold.
• Microelectromechanical_systems wikiPageWikiLink Hookes_law.
• Microelectromechanical_systems wikiPageWikiLink Hydrofluoric_acid.
• Microelectromechanical_systems wikiPageWikiLink Hysteresis.
• Microelectromechanical_systems wikiPageWikiLink IPhone.
• Microelectromechanical_systems wikiPageWikiLink Inertia.
• Microelectromechanical_systems wikiPageWikiLink Injection_molding.
• Microelectromechanical_systems wikiPageWikiLink Injection_moulding.
• Microelectromechanical_systems wikiPageWikiLink Inkjet_printer.
• Microelectromechanical_systems wikiPageWikiLink Inkjet_printing.
• Microelectromechanical_systems wikiPageWikiLink Integrated_circuit.
• Microelectromechanical_systems wikiPageWikiLink Interferometric_modulator_display.
• Microelectromechanical_systems wikiPageWikiLink Ion_beam_lithography.
• Microelectromechanical_systems wikiPageWikiLink Ion_milling_machine.
• Microelectromechanical_systems wikiPageWikiLink Ion_track.
• Microelectromechanical_systems wikiPageWikiLink Ion_track_technology.
• Microelectromechanical_systems wikiPageWikiLink Kelvin_probe_force_microscope.
• Microelectromechanical_systems wikiPageWikiLink LPCVD.
• Microelectromechanical_systems wikiPageWikiLink MEMS_gyroscope.
• Microelectromechanical_systems wikiPageWikiLink MEMS_sensor_generations.
• Microelectromechanical_systems wikiPageWikiLink MEMS_thermal_actuator.
• Microelectromechanical_systems wikiPageWikiLink Maskless_lithography.
• Microelectromechanical_systems wikiPageWikiLink Micro-Opto-Electro-Mechanical_Systems.
• Microelectromechanical_systems wikiPageWikiLink Micro-opto-electromechanical_systems.
• Microelectromechanical_systems wikiPageWikiLink Microfluidic.
• Microelectromechanical_systems wikiPageWikiLink Microfluidics.
• Microelectromechanical_systems wikiPageWikiLink Micromachinery.

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