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- Chemistry_of_photolithography abstract "Photolithography is a process in removing select portions of thin films used in microfabrication. Microfabrication is the production of parts on the micro- and nano- scale, typically on the surface of silicon wafers for the production of microelectromechanical systems (MEMS). Photolithography makes this process possible through the combined used of hexamethyldisilazane (HMDS), photoresist (positive or negative), a spin coater, photomask, an exposure system and other various chemicals. By carefully manipulating these factors it is possible to create nearly any geometry microstructure on the surface of a silicon wafer. The chemical interaction between all the different components and the surface of the silicon wafer makes photolithography an interesting chemistry problem. Current science has been able to create features on the surface of silicon wafers between 1 and 100 µm.".
- Chemistry_of_photolithography thumbnail Gold_and_aluminum_solar_cell_manufactured_at_Cal_Poly_Microfab_Clean_Room.jpg?width=300.
- Chemistry_of_photolithography wikiPageID "36051507".
- Chemistry_of_photolithography wikiPageLength "14037".
- Chemistry_of_photolithography wikiPageOutDegree "36".
- Chemistry_of_photolithography wikiPageRevisionID "663897796".
- Chemistry_of_photolithography wikiPageWikiLink Angstrom.
- Chemistry_of_photolithography wikiPageWikiLink Anisotropy.
- Chemistry_of_photolithography wikiPageWikiLink Bis(trimethylsilyl)amine.
- Chemistry_of_photolithography wikiPageWikiLink Category:Lithography_(microfabrication).
- Chemistry_of_photolithography wikiPageWikiLink Czochralski_process.
- Chemistry_of_photolithography wikiPageWikiLink Diamond_cubic.
- Chemistry_of_photolithography wikiPageWikiLink Erg.
- Chemistry_of_photolithography wikiPageWikiLink File:Surface_Chemistry_of_HMDS.jpg.
- Chemistry_of_photolithography wikiPageWikiLink Goniometer.
- Chemistry_of_photolithography wikiPageWikiLink Hexamethyldisilazane.
- Chemistry_of_photolithography wikiPageWikiLink Hydrophobe.
- Chemistry_of_photolithography wikiPageWikiLink Hydrophobic.
- Chemistry_of_photolithography wikiPageWikiLink Lithography.
- Chemistry_of_photolithography wikiPageWikiLink Microelectromechanical_systems.
- Chemistry_of_photolithography wikiPageWikiLink Microfabrication.
- Chemistry_of_photolithography wikiPageWikiLink Micrometre.
- Chemistry_of_photolithography wikiPageWikiLink Miller_index.
- Chemistry_of_photolithography wikiPageWikiLink Photolithography.
- Chemistry_of_photolithography wikiPageWikiLink Photomask.
- Chemistry_of_photolithography wikiPageWikiLink Photoresist.
- Chemistry_of_photolithography wikiPageWikiLink Silicon_wafer.
- Chemistry_of_photolithography wikiPageWikiLink Spin_coater.
- Chemistry_of_photolithography wikiPageWikiLink Spin_coating.
- Chemistry_of_photolithography wikiPageWikiLink Thin_film.
- Chemistry_of_photolithography wikiPageWikiLink Thin_films.
- Chemistry_of_photolithography wikiPageWikiLink Wafer_(electronics).
- Chemistry_of_photolithography wikiPageWikiLink Ångström.
- Chemistry_of_photolithography wikiPageWikiLink Μm.
- Chemistry_of_photolithography wikiPageWikiLink File:Contact_angle.svg.
- Chemistry_of_photolithography wikiPageWikiLink File:Crystalline_faces_of_silicon.jpg.
- Chemistry_of_photolithography wikiPageWikiLink File:Czochralski_Process.svg.
- Chemistry_of_photolithography wikiPageWikiLink File:Gold_and_aluminum_solar_cell_manufactured_at_Cal_Poly_Microfab_Clean_Room.jpg.
- Chemistry_of_photolithography wikiPageWikiLink File:HMDS-3D.png.
- Chemistry_of_photolithography wikiPageWikiLink File:Hexamethylsilazane.svg.
- Chemistry_of_photolithography wikiPageWikiLink File:Spinner.jpg.
- Chemistry_of_photolithography wikiPageWikiLinkText "Chemistry of photolithography".
- Chemistry_of_photolithography hasPhotoCollection Chemistry_of_photolithography.
- Chemistry_of_photolithography wikiPageUsesTemplate Template:Orphan.
- Chemistry_of_photolithography wikiPageUsesTemplate Template:Reflist.
- Chemistry_of_photolithography subject Category:Lithography_(microfabrication).
- Chemistry_of_photolithography hypernym Process.
- Chemistry_of_photolithography type Election.
- Chemistry_of_photolithography comment "Photolithography is a process in removing select portions of thin films used in microfabrication. Microfabrication is the production of parts on the micro- and nano- scale, typically on the surface of silicon wafers for the production of microelectromechanical systems (MEMS). Photolithography makes this process possible through the combined used of hexamethyldisilazane (HMDS), photoresist (positive or negative), a spin coater, photomask, an exposure system and other various chemicals.".
- Chemistry_of_photolithography label "Chemistry of photolithography".
- Chemistry_of_photolithography sameAs m.0jzy2xk.
- Chemistry_of_photolithography sameAs Q5090572.
- Chemistry_of_photolithography sameAs Q5090572.
- Chemistry_of_photolithography wasDerivedFrom Chemistry_of_photolithography?oldid=663897796.
- Chemistry_of_photolithography depiction Gold_and_aluminum_solar_cell_manufactured_at_Cal_Poly_Microfab_Clean_Room.jpg.
- Chemistry_of_photolithography isPrimaryTopicOf Chemistry_of_photolithography.