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- EECS-2005-28.html isCitedBy Extreme_ultraviolet_lithography.
- EECS-2005-28.html title "Fast Simulation Methods for Non-Planar Phase and Multilayer Defects in DUV and EUV Photomasks for Lithography".
- EECS-2005-28.html url "http://www.eecs.berkeley.edu/Pubs/TechRpts/2005/EECS-2005-28.html".
- EECS-2005-28.html work "berkeley.edu".