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- cnf_spietoc.html author2 "M. J. Rooks".
- cnf_spietoc.html chapter "2".
- cnf_spietoc.html first "M. A.".
- cnf_spietoc.html isCitedBy Electron-beam_lithography.
- cnf_spietoc.html isCitedBy Microelectromechanical_systems.
- cnf_spietoc.html last "McCord".
- cnf_spietoc.html title "SPIE Handbook of Microlithography, Micromachining and Microfabrication".
- cnf_spietoc.html url cnf_spietoc.html.
- cnf_spietoc.html year "2000".