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- proc-838-o10.5 doi "10.1557/PROC-838-O10.5".
- proc-838-o10.5 first1 "Y.".
- proc-838-o10.5 first2 "T.".
- proc-838-o10.5 first3 "U.".
- proc-838-o10.5 isCitedBy NanoAndMore.
- proc-838-o10.5 journal "MRS Proceedings".
- proc-838-o10.5 last1 "Stefanov".
- proc-838-o10.5 last2 "Ruland".
- proc-838-o10.5 last3 "Schwalke".
- proc-838-o10.5 title "Electrical AFM Measurements for Evaluation of Nitride Erosion in Shallow Trench Isolation Chemical Mechanical Planarization".
- proc-838-o10.5 volume "838".
- proc-838-o10.5 year "2011".