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- 12.387563 author "Saburoh Satoh, Takao Tanaka, Satoshi Ihara, Chobei Yamabe".
- 12.387563 displayEditors "3".
- 12.387563 doi "10.1117/12.387563".
- 12.387563 editor1First "Henry".
- 12.387563 editor1Last "Helvajian".
- 12.387563 editor2First "Koji".
- 12.387563 editor2Last "Sugioka".
- 12.387563 editor3First "Malcolm C".
- 12.387563 editor3Last "Gower".
- 12.387563 editor4First "Jan J".
- 12.387563 editor4Last "Dubowski".
- 12.387563 isCitedBy Excimer_lamp.
- 12.387563 journal "Proceedings of the SPIE".
- 12.387563 pages "272–279".
- 12.387563 series "Laser Applications in Microelectronic and Optoelectronic Manufacturing V".
- 12.387563 title "Excimer lamp stereolithography".
- 12.387563 volume "3933".
- 12.387563 year "2000".