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- 12.387543 bibcode "2000SPIE.3933...77Y".
- 12.387543 doi "10.1117/12.387543".
- 12.387543 first1 "David".
- 12.387543 first2 "Michael Y.".
- 12.387543 first3 "Shaike".
- 12.387543 first4 "Izhack".
- 12.387543 first5 "Boris".
- 12.387543 isCitedBy Oramir.
- 12.387543 journal "Proc. SPIE".
- 12.387543 last1 "Yogev".
- 12.387543 last2 "Engel".
- 12.387543 last3 "Zeid".
- 12.387543 last4 "Barzilay".
- 12.387543 last5 "Livshits".
- 12.387543 pages "77–88".
- 12.387543 title "Laser chemical process for clean applications of semiconductor manufacturing".
- 12.387543 volume "3933".