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- 12.386448 doi "10.1117/12.386448".
- 12.386448 first "K. W.".
- 12.386448 first2 "R. H.".
- 12.386448 isCitedBy Extreme_ultraviolet_lithography.
- 12.386448 journal "Proc. SPIE".
- 12.386448 last "Berger".
- 12.386448 last2 "Campiotti".
- 12.386448 pages "838".
- 12.386448 title "Absolute dosimetry for extreme-ultraviolet lithography".
- 12.386448 volume "3998".
- 12.386448 year "2000".