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- 12.174165 conference "Integrated Circuit Metrology, Inspection, and Process Control VIII".
- 12.174165 conferenceurl 1?isAuthorized=no.
- 12.174165 date "1994-05-01".
- 12.174165 doi "10.1117/12.174165".
- 12.174165 editor1First "Marylyn H".
- 12.174165 editor1Last "Bennett".
- 12.174165 first1 "Ricardo".
- 12.174165 first2 "Bruce W.".
- 12.174165 first3 "Jon K.".
- 12.174165 first4 "Mehdi".
- 12.174165 isCitedBy Mehdi_Vaez-Iravani.
- 12.174165 issn "0361-0748".
- 12.174165 last1 "Toledo-Crow".
- 12.174165 last2 "Smith".
- 12.174165 last3 "Rogers".
- 12.174165 last4 "Vaez-Iravani".
- 12.174165 location "Bellingham, WA, USA".
- 12.174165 oclc "703607580".
- 12.174165 page "62".
- 12.174165 publisher SPIE.
- 12.174165 title "Near-field optical microscopy characterization of IC metrology".
- 12.174165 volume "2196".