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- 12.148946 conference "Integrated Circuit Metrology, Inspection, and Process Control VII".
- 12.148946 conferenceurl 1?isAuthorized=no.
- 12.148946 date "1993-08-04".
- 12.148946 doi "10.1117/12.148946".
- 12.148946 editor1First "Michael T.".
- 12.148946 editor1Last "Postek".
- 12.148946 first1 "Ricardo".
- 12.148946 first2 "Mehdi".
- 12.148946 first3 "Bruce W.".
- 12.148946 first4 "Joseph R.".
- 12.148946 isCitedBy Mehdi_Vaez-Iravani.
- 12.148946 issn "0361-0748".
- 12.148946 last1 "Toledo-Crow".
- 12.148946 last2 "Vaez-Iravani".
- 12.148946 last3 "Smith".
- 12.148946 last4 "Summa".
- 12.148946 location "Bellingham, WA, USA".
- 12.148946 oclc "563909391".
- 12.148946 pages "357–368".
- 12.148946 publisher SPIE.
- 12.148946 title "Characterization of atomic force microscopy and electrical probing techniques for IC metrology".
- 12.148946 volume "1926".