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- 1.2743374 doi "10.1117/1.2743374".
- 1.2743374 first1 "Shubham".
- 1.2743374 isCitedBy Thermal_scanning_probe_lithography.
- 1.2743374 issue "2".
- 1.2743374 journal "Journal of Micro/Nanolithography, MEMS, and MOEMS".
- 1.2743374 last1 "Saxena".
- 1.2743374 pages "023012".
- 1.2743374 title "Nanoscale thermal lithography by local polymer decomposition using a heated atomic force microscope cantilever tip".
- 1.2743374 volume "6".
- 1.2743374 year "2007".