Matches in DBpedia 2016-04 for { <http://doi.org/10.1116/1.576129> ?p ?o }
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- 1.576129 author "K. Ishii".
- 1.576129 date "1989".
- 1.576129 doi "10.1116/1.576129".
- 1.576129 isCitedBy Sputter_deposition.
- 1.576129 journal "Journal of Vacuum Science and Technology A".
- 1.576129 pages "256–258".
- 1.576129 title "High-rate low kinetic energy gas-flow-sputtering system".
- 1.576129 volume "7".