Matches in DBpedia 2016-04 for { <http://doi.org/10.1116/1.569958> ?p ?o }
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- 1.569958 date "1979-03-01".
- 1.569958 doi "10.1116/1.569958".
- 1.569958 first "J. W.".
- 1.569958 first2 "Harold F.".
- 1.569958 isCitedBy Plasma_etching.
- 1.569958 issn "0022-5355".
- 1.569958 issue "2".
- 1.569958 journal "Journal of Vacuum Science & Technology".
- 1.569958 last "Coburn".
- 1.569958 last2 "Winters".
- 1.569958 pages "391–403".
- 1.569958 title "Plasma etching—A discussion of mechanisms".
- 1.569958 url "http://scitation.aip.org/content/avs/journal/jvst/16/2/10.1116/1.569958".
- 1.569958 volume "16".